Joint publication chosen as a highlight paper in 2023
“High-mobility 4 μm MOVPE-grown (100) β-Ga2O3 film by parasitic particles suppression” has been specially selected as one the 2023 highlight papers in the Japanese Journal of Applied Physics.
The paper presented by the IKZ authors Ta-Shun Chou, Palvan Seyidov, Saud Bin Anooz, Raimund Grüneberg, Jana Rehm, Thi Thuy Vi Tran, Andreas Fiedler, Zbigniew Galazka, Martin Albrecht, and the FBH author Kornelius Tetzner investigates the development of unwanted parasitic particles in the Metal-Organic Vapor Phase Epitaxy (MOVPE) chamber while growing μm level films. The researchers present a solution to significantly suppress parasitic particle appearance, thereby improving the electrical properties of the grown film.
