Characterization Techniques

For characterization of devices and circuits as well as for model verification, FBH relies on high-level measurement equipment and a dedicated group of measurement engineers and scientists.

DC Measurements

Fully automatic prober system for wafer-mapping of transfer and output characteristics as well as via resistance.

  • Keysight B2912A Precision SMU (Triax)
  • Keysight 5252A Matrix Switch (Triax)
  • Keysight B1500 parameter analyzator
  • MPI TS2000-SE automatic probestation with thermochuck

Measurement system for isothermal dynamic IV characteristics.  

  • Accent Dynamic IV analyzer (DIVA) D265
  • Alessi REL-4500 half-automatic wafer prober with Temptronic thermochuck

RF small signal measurements

2-port vector network analyzer measurements to 67 GHz for on-wafer S-parameter measurements of passive and active components. Developed for modelling and metrology measurements. This system was financed by the research the Research Fab Microelectronics Germany (FMD). 

  • Keysight PNA N5227B 10 - MHz 67 GHz Vector network analyzer
  • Keysight B2912A gate SMU
  • HP 4145B Semiconductor Parameter Analyzor
  • MPI TS2000-SE Automatic probestation with Thermochuck

2-port vector network analyzer measurements with millimeter-wave converters to 220 GHz for on-wafer S-parameter measurements of passive and active components. Developed for modelling and metrology measurements.  

  • Anritsu MS4647B 70 GHz Vektor network analyzer
  • Anritsu 3739C Broadband testset
  • Anritsu MA25400A mmWave Modules
  • HP 4155A Semiconductor Parameter Analyzor
  • Karl-Suss PA200 Semiautomatic probestation

Pulsed S-parameter measurement system to 40 GHz for isothermal measurements for modeling and investigation of trapping effects.

  • Auriga AU4850 pulsed DC/S Controller
  • Auriga XXYY output pulser, 200 ns minimum pulse width, 220 V und 2 A pulsed (40 W) 
  • pulsed Keysight PNAX N5245A (50 GHz) vector network analyzer
  • Cascade Summit 11000, manual probe station with Tempronic thermochuck

RF Large signal measurements

Mechanical load-pull system for very high power measurements of packed devices, for performance and model verification.

  • Maury Tuner-System MT981, 0.8 – 6.5 GHz, 250 W CW (2.5 kW PEP)
  • Scalar Load-Pull Messungen, Gepulste und CW
  • Agilent E4419B powermeter
  • Keithley 2400 SMU (Gate)
  • Agilent DC supply, 100 V, 15 A (drain)
  • transistor test-fixture from Intercontinental Microwave (ICM)
  • water cooling, optional temperature control 10 - 90 C°

On-wafer load-pull measurement setup with mechanical tuners for model verification measurements in mmWave range for active components.

  • Focus Tuner-System PMT 3280 APC3.5, 8 – 32 GHz, max 20 W
  • Focus Tuner-System PMT 5080, PC2.4, 8 – 50 GHz, max 10 W
  • scalar Load-Pull Messungen, Gepulste und CW
  • Agilent N1912A Lestungsmesser
  • vector load-pull, load-line measurements, PNAX N5245A with LSNA Option
  • (X-parameter measurements)
  • Cascade Summit 11000, manual probe station with Tempronic thermochuck

Wideband Modulated Measurements

System measurement setup for power amplifier measurements in a 50 Ohm environment or modulated measurements with digital pre-dirstortion (DPD). The system operates up to 6 GHz with more than 300 MHz modulation bandwidth. The system is operated by the RF Power Lab.

  • Keysight MXG Quelle (LO or Modulated)
  • IQ Modulator and Demodulator from Linear Technology (LT)
  • Tabor 2184 Arbitrary Waveform Generator (AWG), 4 analog channels and 32 digital channels, 14-bit, 2.3 GS/s
  • digitizer von SP Devices, AD14DC with totally 4 channels, 14-bit, 2.0 GS/s
  • water cooling, optional temperature control 10 - 90 C°
  • fully Matlab controlled

System measurement setup for on-wafer MMIC power amplifier measurements in a non-50 Ohm environment for modulated measurements with digital pre-dirstortion (DPD). The 16-Port system operates up to 67 GHz with more than 2 GHz modulation bandwidth. The system is operated by the RF Power Lab.

Services

These procedures are routinely performed within our current research activities. We also offer our expertise to external partners and customers in the framework of projects and contracts (consulting, measurement).

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