AVS ALD/ALE 2024

FBH will be presenting its latest research findings at the AVS 24th International Conference on Atomic Layer Deposition (ALD 2024) featuring the 11th International Atomic Layer Etching Workshop (ALE 2024).

06.08.2024, Poster presentation

• Plasma Enhanced Atomic Layer Deposition of Hafnium Oxide (HfO₂) Thin Films for MIS and MIM Devices

Here you will find the conference website and the program.