S. Hagedorn¹, T. Kolbe¹, G. Schmidt², F. Bertram², C. Netzel¹, A. Knauer¹, P. Veit², J. Christen², and M. Weyers¹

Published in:

Appl. Phys. Lett., vol. 124, no. 6, pp. 063506, doi:10.1063/5.0183772 (2024).

Abstract:

AlN layers annealed at high temperatures offer low threading dislocation densities of mid 10⁸ cm^-2 and are therefore increasingly used as base layers in ultraviolet (UV) light emitting diode (LED) heterostructure growth. These LEDs, just like those grown on conventional metalorganic vapor phase epitaxy (MOVPE) AlN templates, often suffer from long-wavelength parasitic luminescence. In this work, luminescence properties of far-UVC LED heterostructures grown on MOVPE-AlN/sapphire templates and high-temperature annealed AlN/sapphire templates are compared. To investigate the origin of parasitic emission with high spatial resolution, cross section scanning transmission electron microscopy was combined with cathodoluminescence measurements. As a result, the main origin of the parasitic luminescence band centered at 3.5 eV (354 nm) for the heterostructure grown on annealed AlN is assigned to point defects related to oxygen in the AlN template layer. The defect band centered at 3.0 eV (413 nm) for the heterostructure grown on MOVPE-AlN was found to be related to self-compensating VAl-Si point defect complexes in the n-AlGaN layer and oxygen incorporation close to the AlN/sapphire interface. The results also suggest that the type of AlN template determines the kind of parasitic luminescence from the n-AlGaN layer.

© 2024 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). https://doi.org/10.1063/5.0183772
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