The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication
V. Deinhart1,2, L.-M. Kern3, J.N. Kirchhof4, S. Juergensen4, J. Sturm1,2, E. Krauss5, T. Feichtner6, S. Kovalchuk4, M. Schneider3, D. Engel3, B. Pfau3, B. Hecht5, K.I. Bolotin4, S. Reich4 and K. Höflich2,§
Published in:
Beilstein J. Nanotechnol., vol. 12, pp. 304-318, doi:10.3762/bjnano.12.25 (2021).
Abstract:
Focused beams of helium ions are a powerful tool for high-fidelity machining with spatial precision below 5 nm. Achieving such a high patterning precision over large areas and for different materials in a reproducible manner, however, is not trivial. Here, we introduce the Python toolbox FIB-o-mat for automated pattern creation and optimization, providing full flexibility to accomplish demanding patterning tasks. FIB-o-mat offers high-level pattern creation, enabling high-fidelity large-area patterning and systematic variations in geometry and raster settings. It also offers low-level beam path creation, providing full control over the beam movement and including sophisticated optimization tools. Three applications showcasing the potential of He ion beam nanofabrication for two-dimensional material systems and devices using FIB-o-mat are presented.
1 Ferdinand-Braun-Institut gGmbH, Leibniz-Institut für Höchstfrequenztechnik, Gustav-Kirchhoff-Str. 4, 12489 Berlin, Germany
2 Corelab Correlative Microscopy and Spectroscopy, Helmholtz-Zentrum Berlin für Materialien und Energie, Hahn-Meitner-Platz 1, 14109 Berlin, Germany
3 Max Born Institute for Nonlinear Optics and Short Pulse Spectroscopy, Max-Born-Straße 2A, 12489 Berlin, Germany
4 Freie Universität Berlin, Arnimallee 14, 14195 Berlin, Germany
5 Department of Experimental Physics 5, Röntgen Research Center for Complex Material Research (RCCM), Physics Institute, University of Würzburg, Am Hubland, D-97074 Würzburg, Germany
6 Dipartimento di Fisica, Politecnico di Milano, Piazza Leonardo da Vinci, 32 20133 Milano, Italy
§ Present address: Ferdinand-Braun-Institut gGmbH, Leibniz-Institut für Höchstfrequenztechnik, Gustav-Kirchhoff-Str. 4, 12489 Berlin, Germany
Keywords:
automated patterning; focused He ion beam; graphene; magnetic multilayers; mechanical resonator; pattern generation; plasmonic antennas; two-dimensional materials
© 2021 Deinhart et al.; licensee Beilstein-Institut.
This is an open access article under the terms of the Creative Commons Attribution License. Please note that the reuse, redistribution and reproduction in particular requires that the author(s) and source are credited and that individual graphics may be subject to special legal provisions.
Full version in pdf-format.