Time-resolved measurements of the E–H transition in a microwave driven ICP source
H.-E. Porteanu1, I. Stefanović2,4, M. Klute3, P. Awakowicz2, R.P. Brinkmann3 and W. Heinrich1
Published in:
J. Phys. D: Appl. Phys., vol. 58, no. 15, pp. 155206, doi:10.1088/1361-6463/adb9fc (2025).
Abstract:
The transition dynamics from the electrostatic to electromagnetic (E–H) coupling in a 2.45 GHz excited inductively coupled plasma (ICP) source is investigated using a set of microwave time-resolved records at different frequencies. This method, coming from semiconductor physics, has been newly adapted for plasma investigations. Nitrogen and oxygen plasmas have been analyzed in the range 20–1000 Pa with a constant excitation power of 40 W. With a resolution better than 100 ns, one can identify, depending on pressure, the coexistence of the E and H modes, a hybrid EH mode, and, in the case of oxygen plasma, the transition from negative to positive ions. The E–H transition time increases with pressure.
1 Microwave Department, Ferdinand-Braun-Institut (FBH), Berlin, Germany
2 Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany
3 Theoretical Electrical Engineering, Ruhr University Bochum, Bochum, Germany
4 Also at Institute of Technical Sciences, Serbian Academy of Sciences and Arts, Belgrade, Serbia
Keywords:
microwave plasma, E–H transition, hot-S-parameter, resonance dynamics
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