Laser-lift-off of GaN-based transistors with an ultra-short-pulsed deep UV laser
L. Deriks1, E. Bahat Treidel2, E. Brandl3, J. Bravin3, E. Brusaterra2, S. Danylyuk1
Published in:
Proc. of SPIE, vol. 12872, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX, Photonics West, San Francisco, USA, Jan 27 - Feb 1, 1287207 (2024).
1 Fraunhofer Institute for Laser Technology (Germany)
2 Ferdinand-Braun-Institut (Germany)
3 EV Group E. Thallner GmbH (Austria)
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